{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9761688","patent":{"patent_number":"US-9761688","title":"Method of fabricating semiconductor device with tilted preamorphized implant","assignee":null,"inventors":[],"filing_date":"2016-06-16T00:00:00.000Z","publication_date":"2017-09-12T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":19,"abstract":"A method for fabricating a semiconductor device may include: preparing a semiconductor substrate including a doping region; performing tilt implantation using a first additional dopant to form an amorphous region in the doping region; doping a second additional dopant in the amorphous region; forming a metal layer on the doped amorphous region; and reacting the doped amorphous region with the metal layer to form metal silicide."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of fabricating semiconductor device with tilted preamorphized implant","description":"A method for fabricating a semiconductor device may include: preparing a semiconductor substrate including a doping region; performing tilt implantation using a first additional dopant to form an amor","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9761688","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9761688","citation_suggestion":"Patentable. \"Method of fabricating semiconductor device with tilted preamorphized implant\" (US-9761688). https://patentable.app/patents/US-9761688","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9761688","json":"https://patentable.app/api/llm-context/US-9761688","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:14:57.554Z"}