{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9766136","patent":{"patent_number":"US-9766136","title":"Apparatus, system and method of detecting leakage in a chamber","assignee":null,"inventors":[],"filing_date":"2014-06-09T00:00:00.000Z","publication_date":"2017-09-19T00:00:00.000Z","cpc_codes":["G05B"],"num_claims":20,"abstract":"Some demonstrative embodiments include apparatuses, devices and/or methods of detecting leakage in a chamber. For example, an apparatus may include a leakage detector to detect leakage in a chamber based on at least one set of power values corresponding to at least one respective heating zone of the chamber, the set of power values including a plurality of power values corresponding to a respective plurality of manufacturing processes performed by the chamber, wherein a power value of a manufacturing process is based on a plurality of power control values to control the heating zone during the manufacturing process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus, system and method of detecting leakage in a chamber","description":"Some demonstrative embodiments include apparatuses, devices and/or methods of detecting leakage in a chamber. For example, an apparatus may include a leakage detector to detect leakage in a chamber ba","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9766136","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9766136","citation_suggestion":"Patentable. \"Apparatus, system and method of detecting leakage in a chamber\" (US-9766136). https://patentable.app/patents/US-9766136","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9766136","json":"https://patentable.app/api/llm-context/US-9766136","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:59:13.031Z"}