{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9768042","patent":{"patent_number":"US-9768042","title":"Substrate processing method and substrate processing apparatus","assignee":null,"inventors":[],"filing_date":"2015-05-20T00:00:00.000Z","publication_date":"2017-09-19T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"A substrate processing method is implemented in a substrate processing apparatus including a substrate holding and rotating unit having a spin base rotatable about a predetermined vertical axis, and a processing cup surrounding the substrate holding and rotating unit and arranged to receive processing liquid splattering from the substrate rotated by the substrate holding and rotating unit, the substrate processing method including a substrate rotating step of rotating the spin base to rotate the substrate about the vertical axis at a predetermined liquid processing speed and, in parallel with the substrate rotating step, a processing liquid supplying step of supplying processing liquid onto the lower surface of the substrate at a predetermined first flow rate and supplying processing liquid onto the upper surface of the substrate at a second flow rate that is higher than the first flow rate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing method and substrate processing apparatus","description":"A substrate processing method is implemented in a substrate processing apparatus including a substrate holding and rotating unit having a spin base rotatable about a predetermined vertical axis, and a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9768042","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9768042","citation_suggestion":"Patentable. \"Substrate processing method and substrate processing apparatus\" (US-9768042). https://patentable.app/patents/US-9768042","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9768042","json":"https://patentable.app/api/llm-context/US-9768042","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:03:23.299Z"}