{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9768049","patent":{"patent_number":"US-9768049","title":"Support plate and method for forming support plate","assignee":null,"inventors":[],"filing_date":"2016-10-26T00:00:00.000Z","publication_date":"2017-09-19T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":16,"abstract":"A method for processing a wafer having a device region and a peripheral surplus region surrounding the device region on a front surface thereof. The method includes: preparing a support plate including a base plate in which a recess is formed in a front surface region corresponding to the device region and an annular groove is formed in a region corresponding to the peripheral surplus region and a soft member is packed in the recess of the base plate; injecting an adhesive into the annular groove of the support plate; sticking the wafer onto the support plate with the adhesive such that the device region abuts against the soft member; holding the wafer with intermediary of the support plate and performing processing on the wafer; and making a cutting blade cut into a region corresponding to the annular groove of the support plate to remove the adhesive."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Support plate and method for forming support plate","description":"A method for processing a wafer having a device region and a peripheral surplus region surrounding the device region on a front surface thereof. The method includes: preparing a support plate includin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9768049","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9768049","citation_suggestion":"Patentable. \"Support plate and method for forming support plate\" (US-9768049). https://patentable.app/patents/US-9768049","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9768049","json":"https://patentable.app/api/llm-context/US-9768049","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:48:19.718Z"}