{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9772624","patent":{"patent_number":"US-9772624","title":"Control apparatus, substrate processing apparatus, and substrate processing system","assignee":null,"inventors":[],"filing_date":"2015-03-12T00:00:00.000Z","publication_date":"2017-09-26T00:00:00.000Z","cpc_codes":["G05B","G05B","H01L"],"num_claims":6,"abstract":"A control apparatus is configured to control an operation of a substrate processing apparatus configured to place at least a monitor substrate therein. The control apparatus controls the operation of the substrate processing apparatus based on a difference between a processing result of the monitor substrate processed by the substrate processing apparatus and a predictive result so as to optimize the monitor substrate loading frequency."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Control apparatus, substrate processing apparatus, and substrate processing system","description":"A control apparatus is configured to control an operation of a substrate processing apparatus configured to place at least a monitor substrate therein. The control apparatus controls the operation of ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9772624","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9772624","citation_suggestion":"Patentable. \"Control apparatus, substrate processing apparatus, and substrate processing system\" (US-9772624). https://patentable.app/patents/US-9772624","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9772624","json":"https://patentable.app/api/llm-context/US-9772624","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:24:49.404Z"}