{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9773662","patent":{"patent_number":"US-9773662","title":"Method for fabricating a fine structure","assignee":null,"inventors":[],"filing_date":"2016-06-03T00:00:00.000Z","publication_date":"2017-09-26T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"In a method for fabricating a fine structure, a metal oxide layer is formed by using an atomic layer deposition over a substrate, and the metal oxide layer is removed. An interfacial oxide layer is formed between the metal oxide layer and the substrate. The interfacial oxide layer is an oxide of an element constituting the substrate, and the interfacial oxide layer is removed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for fabricating a fine structure","description":"In a method for fabricating a fine structure, a metal oxide layer is formed by using an atomic layer deposition over a substrate, and the metal oxide layer is removed. An interfacial oxide layer is fo","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9773662","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9773662","citation_suggestion":"Patentable. \"Method for fabricating a fine structure\" (US-9773662). https://patentable.app/patents/US-9773662","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9773662","json":"https://patentable.app/api/llm-context/US-9773662","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:20:51.273Z"}