{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9773680","patent":{"patent_number":"US-9773680","title":"Advanced method for scaled SRAM with flexible active pitch","assignee":null,"inventors":[],"filing_date":"2016-12-13T00:00:00.000Z","publication_date":"2017-09-26T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":13,"abstract":"Devices and methods of fabricating scaled SRAM with flexible active pitch are provided. One method includes, for instance: obtaining an intermediate semiconductor device having a first portion and a second portion, including a plurality of layers and a patterned mandrel; forming a first set of spacers surrounding the patterned mandrel; etching the dielectric layer; depositing a photoresist layer; opening the photoresist layer over the first portion and not the second portion, removing the patterned mandrel in the open areas; etching the dielectric layer in the open areas; removing the photoresist layer, the remaining patterned mandrels, and the first set of spacers in the first and second portion, etching the silicon layer and MTO layer to form a pattern; forming a second set of spacers around the pattern; and etching a set of fins into the substrate and oxide layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Advanced method for scaled SRAM with flexible active pitch","description":"Devices and methods of fabricating scaled SRAM with flexible active pitch are provided. One method includes, for instance: obtaining an intermediate semiconductor device having a first portion and a s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9773680","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9773680","citation_suggestion":"Patentable. \"Advanced method for scaled SRAM with flexible active pitch\" (US-9773680). https://patentable.app/patents/US-9773680","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9773680","json":"https://patentable.app/api/llm-context/US-9773680","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:02:38.717Z"}