{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9773893","patent":{"patent_number":"US-9773893","title":"Forming a sacrificial liner for dual channel devices","assignee":null,"inventors":[],"filing_date":"2016-09-26T00:00:00.000Z","publication_date":"2017-09-26T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"Semiconductor devices and methods of forming the same include forming a liner over one or more channel fins on a substrate. An etch is performed down into the substrate using the one or more channel fins and the liner as a mask to form a substrate fin underneath each of the one or more channel fins. An area around the one or more channel fins and substrate fins is filled with a flowable dielectric. The flowable dielectric is annealed to solidify the flowable dielectric. The anneal oxidizes at least a portion of sidewalls of each substrate fin, such that each substrate fin is narrower in the oxidized portion than in a portion covered by the liner."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Forming a sacrificial liner for dual channel devices","description":"Semiconductor devices and methods of forming the same include forming a liner over one or more channel fins on a substrate. An etch is performed down into the substrate using the one or more channel f","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9773893","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9773893","citation_suggestion":"Patentable. \"Forming a sacrificial liner for dual channel devices\" (US-9773893). https://patentable.app/patents/US-9773893","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9773893","json":"https://patentable.app/api/llm-context/US-9773893","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:23:41.491Z"}