{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9778209","patent":{"patent_number":"US-9778209","title":"Substrate for mask blanks, mask blank, transfer mask, and method of manufacturing them","assignee":null,"inventors":[],"filing_date":"2014-12-09T00:00:00.000Z","publication_date":"2017-10-03T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":13,"abstract":"Provided is a mask blank substrate being a substrate having two main surfaces, in which one of the two main surfaces of the mask blank substrate on a side on which a transfer pattern is formed has such a surface profile that, when a measurement region of 2.8 mm×2.1 mm of the main surface in a transfer pattern formation region is measured using a white light interferometer under conditions of a pixel number of 640×480, a power spectrum density at a spatial frequency of 1.0×10−2 μm−1 calculated from a result of the measurement is 6.0×107 nm4 or less."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate for mask blanks, mask blank, transfer mask, and method of manufacturing them","description":"Provided is a mask blank substrate being a substrate having two main surfaces, in which one of the two main surfaces of the mask blank substrate on a side on which a transfer pattern is formed has suc","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9778209","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9778209","citation_suggestion":"Patentable. \"Substrate for mask blanks, mask blank, transfer mask, and method of manufacturing them\" (US-9778209). https://patentable.app/patents/US-9778209","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9778209","json":"https://patentable.app/api/llm-context/US-9778209","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:49:04.627Z"}