{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9785051","patent":{"patent_number":"US-9785051","title":"Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices","assignee":null,"inventors":[],"filing_date":"2013-09-17T00:00:00.000Z","publication_date":"2017-10-10T00:00:00.000Z","cpc_codes":["G01C","G01C"],"num_claims":29,"abstract":"An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices","description":"An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a ma","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9785051","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9785051","citation_suggestion":"Patentable. \"Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices\" (US-9785051). https://patentable.app/patents/US-9785051","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9785051","json":"https://patentable.app/api/llm-context/US-9785051","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:33:07.750Z"}