{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9786473","patent":{"patent_number":"US-9786473","title":"Method of processing workpiece","assignee":null,"inventors":[],"filing_date":"2016-10-31T00:00:00.000Z","publication_date":"2017-10-10T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":7,"abstract":"Provided is a method of processing a wafer, which is performed in a processing container of a plasma processing apparatus. This method is a plasma etching method performed on a porous film formed of SiOCH, and is a method of enabling the suppression of various types of deterioration such as an increase in the dielectric constant of the porous film. The wafer includes the porous film and a mask provided on the porous film. The method includes a process of generating a plasma of a first gas and a plasma of a second gas in the processing container and etching the porous film using the mask. The porous film contains SiOCH, and the first gas contains a fluorocarbon-based gas. The second gas contains GeF4 gas."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of processing workpiece","description":"Provided is a method of processing a wafer, which is performed in a processing container of a plasma processing apparatus. This method is a plasma etching method performed on a porous film formed of S","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9786473","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9786473","citation_suggestion":"Patentable. \"Method of processing workpiece\" (US-9786473). https://patentable.app/patents/US-9786473","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9786473","json":"https://patentable.app/api/llm-context/US-9786473","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:38:35.035Z"}