{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9786475","patent":{"patent_number":"US-9786475","title":"Systems and methods for plasma processing of microfeature workpieces","assignee":null,"inventors":[],"filing_date":"2014-03-18T00:00:00.000Z","publication_date":"2017-10-10T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":9,"abstract":"Systems and methods for plasma processing of microfeature workpieces are disclosed herein. In one embodiment, a method includes generating a plasma in a chamber while a microfeature workpiece is positioned in the chamber, measuring optical emissions from the plasma, and determining a parameter of the plasma based on the measured optical emissions. The parameter can be an ion density or another parameter of the plasma."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for plasma processing of microfeature workpieces","description":"Systems and methods for plasma processing of microfeature workpieces are disclosed herein. In one embodiment, a method includes generating a plasma in a chamber while a microfeature workpiece is posit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9786475","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9786475","citation_suggestion":"Patentable. \"Systems and methods for plasma processing of microfeature workpieces\" (US-9786475). https://patentable.app/patents/US-9786475","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9786475","json":"https://patentable.app/api/llm-context/US-9786475","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:39:31.793Z"}