{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9786545","patent":{"patent_number":"US-9786545","title":"Method of forming ANA regions in an integrated circuit","assignee":null,"inventors":[],"filing_date":"2016-09-21T00:00:00.000Z","publication_date":"2017-10-10T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method includes providing a structure having a first hardmask layer, interposer layer, second hardmask layer and mandrel layer disposed respectively over a dielectric stack. An array of mandrels is patterned into the mandrel layer with a mandrel mask. An ANA trench is patterned into the mandrel layer with a first cut mask. The ANA trench is patterned into the interposer layer with a second cut mask. An organic planarization layer (OPL) is disposed over the structure. The OPL is etched to dispose it only in the ANA trench such that a top surface of the OPL is lower than the second hardmask layer. The structure is etched to form a pattern in a dielectric layer of the dielectric stack to form an array of metal lines in the dielectric layer, a portion of the pattern formed by the ANA trench forms an ANA region within the dielectric layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming ANA regions in an integrated circuit","description":"A method includes providing a structure having a first hardmask layer, interposer layer, second hardmask layer and mandrel layer disposed respectively over a dielectric stack. An array of mandrels is ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9786545","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9786545","citation_suggestion":"Patentable. \"Method of forming ANA regions in an integrated circuit\" (US-9786545). https://patentable.app/patents/US-9786545","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9786545","json":"https://patentable.app/api/llm-context/US-9786545","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:13:55.642Z"}