{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9791274","patent":{"patent_number":"US-9791274","title":"MEMS mass-spring-damper systems using an out-of-plane suspension scheme","assignee":null,"inventors":[],"filing_date":"2014-02-03T00:00:00.000Z","publication_date":"2017-10-17T00:00:00.000Z","cpc_codes":["G01C"],"num_claims":15,"abstract":"MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS mass-spring-damper systems using an out-of-plane suspension scheme","description":"MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclose","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9791274","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9791274","citation_suggestion":"Patentable. \"MEMS mass-spring-damper systems using an out-of-plane suspension scheme\" (US-9791274). https://patentable.app/patents/US-9791274","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9791274","json":"https://patentable.app/api/llm-context/US-9791274","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:50:43.952Z"}