{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9793155","patent":{"patent_number":"US-9793155","title":"Method of fabricating flash memory device","assignee":null,"inventors":[],"filing_date":"2015-06-09T00:00:00.000Z","publication_date":"2017-10-17T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":13,"abstract":"A method of fabricating a memory device includes forming an etching object layer and a lower sacrificial layer on a substrate, and forming an upper sacrificial pattern structure on the lower sacrificial layer. The upper sacrificial pattern structure includes a pad portion and a line portion on the lower sacrificial layer. An upper spacer is formed by covering a side wall of the upper sacrificial pattern structure. A lower sacrificial pattern structure including a lower sacrificial pad portion and a lower sacrificial line portion is formed by etching the lower sacrificial layer, by using the upper sacrificial pad portion and the upper spacer as a mask. A lower spacer layer is formed by covering the lower sacrificial pattern structure. A lower mask pattern including at least one line mask, bridge mask, and pad mask, is formed by etching the lower spacer layer and the lower sacrificial pattern structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of fabricating flash memory device","description":"A method of fabricating a memory device includes forming an etching object layer and a lower sacrificial layer on a substrate, and forming an upper sacrificial pattern structure on the lower sacrifici","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9793155","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9793155","citation_suggestion":"Patentable. \"Method of fabricating flash memory device\" (US-9793155). https://patentable.app/patents/US-9793155","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9793155","json":"https://patentable.app/api/llm-context/US-9793155","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:09:01.108Z"}