{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9793185","patent":{"patent_number":"US-9793185","title":"Test structure for monitoring liner oxidation","assignee":null,"inventors":[],"filing_date":"2014-11-12T00:00:00.000Z","publication_date":"2017-10-17T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":21,"abstract":"Embodiments of a method for forming a device using test structures are presented. The method includes providing a wafer with a device layer. The device layer includes a main device region and a perimeter region. The device layer is patterned with active and test patterns. Test patterns include dummy patterns disposed in a test device area. The wafer is processed to form at least one test device disposed in the perimeter region and one or more active devices disposed in the main device region. The test device determines a design window of the one or more active devices. Additional processing is performed to complete forming the device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Test structure for monitoring liner oxidation","description":"Embodiments of a method for forming a device using test structures are presented. The method includes providing a wafer with a device layer. The device layer includes a main device region and a perime","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9793185","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9793185","citation_suggestion":"Patentable. \"Test structure for monitoring liner oxidation\" (US-9793185). https://patentable.app/patents/US-9793185","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9793185","json":"https://patentable.app/api/llm-context/US-9793185","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:20:27.481Z"}