{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9798231","patent":{"patent_number":"US-9798231","title":"Imprint apparatus and method of manufacturing article","assignee":null,"inventors":[],"filing_date":"2013-01-09T00:00:00.000Z","publication_date":"2017-10-24T00:00:00.000Z","cpc_codes":["B82Y","B82Y","G11B"],"num_claims":14,"abstract":"The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Imprint apparatus and method of manufacturing article","description":"The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformati","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9798231","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9798231","citation_suggestion":"Patentable. \"Imprint apparatus and method of manufacturing article\" (US-9798231). https://patentable.app/patents/US-9798231","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9798231","json":"https://patentable.app/api/llm-context/US-9798231","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:33:31.587Z"}