{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9799678","patent":{"patent_number":"US-9799678","title":"Manufacturing method of thin film and metal line for display using the same, thin film transistor array panel, and method for manufacturing the same","assignee":null,"inventors":[],"filing_date":"2015-01-26T00:00:00.000Z","publication_date":"2017-10-24T00:00:00.000Z","cpc_codes":["G02F","H01L","H01L","H01L","H01L","H01L"],"num_claims":9,"abstract":"A method for forming a thin film according to an exemplary embodiment of the present invention includes forming the thin film at a power density in the range of approximately 1.5 to approximately 3 W/cm2 and at a pressure of an inert gas that is in the range of approximately 0.2 to approximately 0.3 Pa. This process results in an amorphous metal thin film barrier layer that prevents undesired diffusion from adjacent layers, even when this barrier layer is thinner than many conventional barrier layers."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Manufacturing method of thin film and metal line for display using the same, thin film transistor array panel, and method for manufacturing the same","description":"A method for forming a thin film according to an exemplary embodiment of the present invention includes forming the thin film at a power density in the range of approximately 1.5 to approximately 3 W/","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9799678","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9799678","citation_suggestion":"Patentable. \"Manufacturing method of thin film and metal line for display using the same, thin film transistor array panel, and method for manufacturing the same\" (US-9799678). https://patentable.app/patents/US-9799678","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9799678","json":"https://patentable.app/api/llm-context/US-9799678","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:34:11.537Z"}