{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9799827","patent":{"patent_number":"US-9799827","title":"Method of manufacturing an electronic device including a semiconductor memory having a metal electrode and a metal compound layer surrounding sidewall of the metal electrode","assignee":null,"inventors":[],"filing_date":"2015-10-09T00:00:00.000Z","publication_date":"2017-10-24T00:00:00.000Z","cpc_codes":["G11C","G11C","G11C"],"num_claims":23,"abstract":"A method of manufacturing an electronic device including a semiconductor memory is provided. The method may include forming a material layer for forming a variable resistance element over a substrate, forming a metal layer over the material layer, forming a mask pattern over the metal layer, forming a metal layer pattern by etching the metal layer using the mask pattern as an etch barrier, performing a surface treatment on the metal layer pattern, and etching the material layer using the metal layer pattern and the metal compound layer as an etch barrier to form a variable resistance element having an external side aligned with an external side of the metal compound layer. An external part of the metal layer pattern may be transformed into a metal compound layer. The metal compound layer may have a low etch rate as an etch barrier."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of manufacturing an electronic device including a semiconductor memory having a metal electrode and a metal compound layer surrounding sidewall of the metal electrode","description":"A method of manufacturing an electronic device including a semiconductor memory is provided. The method may include forming a material layer for forming a variable resistance element over a substrate,","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9799827","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9799827","citation_suggestion":"Patentable. \"Method of manufacturing an electronic device including a semiconductor memory having a metal electrode and a metal compound layer surrounding sidewall of the metal electrode\" (US-9799827). https://patentable.app/patents/US-9799827","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9799827","json":"https://patentable.app/api/llm-context/US-9799827","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:37:08.567Z"}