{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9806031","patent":{"patent_number":"US-9806031","title":"Monitor method for process control in a semiconductor fabrication process","assignee":null,"inventors":[],"filing_date":"2015-04-22T00:00:00.000Z","publication_date":"2017-10-31T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":8,"abstract":"A monitor method for process control in a semiconductor fabrication process is disclosed. A first alignment mark is formed in a layer on a substrate, and its position is measured and stored in a first measurement data. A fabrication process is then performed. Afterwards, another measurement is performed to measure the position of the first alignment mark and to generate a second measurement data. Finally, an offset value between the position of the first alignment mark in the first measurement data and those in the second measurement data is calculated."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Monitor method for process control in a semiconductor fabrication process","description":"A monitor method for process control in a semiconductor fabrication process is disclosed. A first alignment mark is formed in a layer on a substrate, and its position is measured and stored in a first","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9806031","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9806031","citation_suggestion":"Patentable. \"Monitor method for process control in a semiconductor fabrication process\" (US-9806031). https://patentable.app/patents/US-9806031","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9806031","json":"https://patentable.app/api/llm-context/US-9806031","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:26:40.541Z"}