{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9806032","patent":{"patent_number":"US-9806032","title":"Integrated circuit structure with refractory metal alignment marker and methods of forming same","assignee":null,"inventors":[],"filing_date":"2016-12-20T00:00:00.000Z","publication_date":"2017-10-31T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":15,"abstract":"The disclosure relates to integrated circuit (IC) structures and fabrication techniques. Methods according to the disclosure can include: providing a precursor structure including: a first inter-metal dielectric (IMD); a barrier dielectric positioned on the first IMD; forming an insulator on the barrier dielectric of the precursor structure, wherein an upper surface of the insulator includes a first trench and a second trench laterally separated from the first trench; forming an alignment marker over the precursor structure by filling the first trench with a first refractory metal film; forming a first metal-insulator-metal (MIM) electrode by filling the second trench with the first refractory metal film; recessing the insulator without exposing an upper surface of the barrier dielectric; forming a MIM dielectric layer on the insulator; and forming a second MIM electrode on the MIM dielectric layer, such that the second MIM electrode overlies a portion of the first MIM electrode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Integrated circuit structure with refractory metal alignment marker and methods of forming same","description":"The disclosure relates to integrated circuit (IC) structures and fabrication techniques. Methods according to the disclosure can include: providing a precursor structure including: a first inter-metal","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9806032","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9806032","citation_suggestion":"Patentable. \"Integrated circuit structure with refractory metal alignment marker and methods of forming same\" (US-9806032). https://patentable.app/patents/US-9806032","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9806032","json":"https://patentable.app/api/llm-context/US-9806032","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:34:08.421Z"}