{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9809448","patent":{"patent_number":"US-9809448","title":"Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same","assignee":null,"inventors":[],"filing_date":"2015-02-10T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["H04R"],"num_claims":16,"abstract":"A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the MEMS device; and a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm. The MEMS device also includes: a first integrated circuit disposed at a second location of the substrate, wherein the first integrated circuit is electrically coupled to the MEMS microphone; and a MEMS measurement device at a third location, wherein the MEMS measurement device comprises a motion sensor and a pressure sensor."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same","description":"A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environmen","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9809448","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9809448","citation_suggestion":"Patentable. \"Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same\" (US-9809448). https://patentable.app/patents/US-9809448","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9809448","json":"https://patentable.app/api/llm-context/US-9809448","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:14:24.944Z"}