{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9810377","patent":{"patent_number":"US-9810377","title":"System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller","assignee":null,"inventors":[],"filing_date":"2013-03-04T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["G05D"],"num_claims":17,"abstract":"A mass flow controller includes at least one conduit having a fluid inlet and a fluid outlet, the conduit defining a flow path along which the fluid flows. The mass flow controller also includes a modified inlet block having an inlet aperture, an inlet channel, and a reservoir fluidly coupled to the inlet channel and the conduit that enhances flow through the controller and improves rate-of-decay measurements. The mass flow controller includes at least one flow sensor that generates a flow sensor signal that is proportional to the mass flow rate of the fluid through the conduit. The mass flow controller includes a control subsystem coupled to a flow sensor and a valve assembly to control flow through the conduit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller","description":"A mass flow controller includes at least one conduit having a fluid inlet and a fluid outlet, the conduit defining a flow path along which the fluid flows. The mass flow controller also includes a mod","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9810377","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9810377","citation_suggestion":"Patentable. \"System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller\" (US-9810377). https://patentable.app/patents/US-9810377","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9810377","json":"https://patentable.app/api/llm-context/US-9810377","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:04:51.397Z"}