{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9810619","patent":{"patent_number":"US-9810619","title":"Method and system for simultaneous tilt and height control of a substrate surface in an inspection system","assignee":null,"inventors":[],"filing_date":"2013-09-10T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":45,"abstract":"A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height detection system including: a height detection sub-system and a tilt detection sub-system. The system further includes a first actuator configured to selectably actuate the substrate along a direction perpendicular to the surface of the substrate at a location of the substrate stage assembly; and an additional actuator configured to selectably actuate the substrate along a direction substantially perpendicular to the surface of the substrate at an additional location of the substrate stage assembly; and a MIMO tilt-focus controller communicatively coupled to the height detection sub-system, the tilt detection sub-system, the first actuator and the additional actuator."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for simultaneous tilt and height control of a substrate surface in an inspection system","description":"A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height det","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9810619","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9810619","citation_suggestion":"Patentable. \"Method and system for simultaneous tilt and height control of a substrate surface in an inspection system\" (US-9810619). https://patentable.app/patents/US-9810619","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9810619","json":"https://patentable.app/api/llm-context/US-9810619","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:01:17.998Z"}