{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9810902","patent":{"patent_number":"US-9810902","title":"Opening angle measurement of an oscillating MEMS mirror","assignee":null,"inventors":[],"filing_date":"2016-06-24T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["G01D","G01D"],"num_claims":23,"abstract":"A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Opening angle measurement of an oscillating MEMS mirror","description":"A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a c","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9810902","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9810902","citation_suggestion":"Patentable. \"Opening angle measurement of an oscillating MEMS mirror\" (US-9810902). https://patentable.app/patents/US-9810902","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9810902","json":"https://patentable.app/api/llm-context/US-9810902","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:00:29.846Z"}