{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9812325","patent":{"patent_number":"US-9812325","title":"Method for modifying spacer profile","assignee":null,"inventors":[],"filing_date":"2016-09-02T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":12,"abstract":"Techniques herein provide a process to reform or flatten asymmetric spacers to form a square profile which creates symmetric spacers for accurate pattern transfer. Initial spacer formation typically results in spacer profiles with a curved or sloped top surfaces. This asymmetric top surface is isolated while protecting a remaining lower portion of the spacer. The top surface is removed using a plasma processing step resulting in spacers having a squared profile that enables further patterning and/or accurate pattern transfer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for modifying spacer profile","description":"Techniques herein provide a process to reform or flatten asymmetric spacers to form a square profile which creates symmetric spacers for accurate pattern transfer. Initial spacer formation typically r","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9812325","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9812325","citation_suggestion":"Patentable. \"Method for modifying spacer profile\" (US-9812325). https://patentable.app/patents/US-9812325","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9812325","json":"https://patentable.app/api/llm-context/US-9812325","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:45:25.345Z"}