{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9812366","patent":{"patent_number":"US-9812366","title":"Method of tuning work function for a semiconductor device","assignee":null,"inventors":[],"filing_date":"2014-08-15T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":13,"abstract":"A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes forming pre-tuned-work-function (preTWF) layer over a substrate, applying an angular-doping process to the preTWF layer to change a work function of the preTWF layer (referred to as a tuned work function (TWF) layer). The angular-doping process includes injecting a doping species beam to the preTWF layer with a distribution of injecting angle and forming a metal fill layer over the TWF layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of tuning work function for a semiconductor device","description":"A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes forming pre-tuned-work-function (preTWF) layer over a substrate, applying an angular-doping process to","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9812366","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9812366","citation_suggestion":"Patentable. \"Method of tuning work function for a semiconductor device\" (US-9812366). https://patentable.app/patents/US-9812366","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9812366","json":"https://patentable.app/api/llm-context/US-9812366","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:15:55.515Z"}