{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9812536","patent":{"patent_number":"US-9812536","title":"Reverse tone self-aligned contact","assignee":null,"inventors":[],"filing_date":"2016-07-21T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"The present disclosure relate to a method to an integrated chip having a source/drain self-aligned contact to a transistor or other semiconductor device. In some embodiments, the integrated chip has a pair of gate structures including a gate electrode arranged over a substrate and an insulating material arranged over the gate electrode. A source/drain region is arranged within the substrate between the pair of gate structures. An etch stop layer is arranged along sidewalls of the pair of gate structures and over the source/drain region, and a dielectric layer is over the insulating material. A source/drain contact is arranged over the insulating material and the etch stop layer and is separated from the sidewalls of the pair of gate structures by the etch stop layer. The source/drain contact is electrically coupled to the source/drain region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Reverse tone self-aligned contact","description":"The present disclosure relate to a method to an integrated chip having a source/drain self-aligned contact to a transistor or other semiconductor device. In some embodiments, the integrated chip has a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9812536","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9812536","citation_suggestion":"Patentable. \"Reverse tone self-aligned contact\" (US-9812536). https://patentable.app/patents/US-9812536","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9812536","json":"https://patentable.app/api/llm-context/US-9812536","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:48:22.699Z"}