{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9814126","patent":{"patent_number":"US-9814126","title":"Photon source, metrology apparatus, lithographic system and device manufacturing method","assignee":null,"inventors":[],"filing_date":"2014-09-23T00:00:00.000Z","publication_date":"2017-11-07T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N"],"num_claims":26,"abstract":"A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. First container is enclosed within a hermetically sealed second container. Any ozone generated within the second container as a result of ultraviolet components of the output radiation is completely contained within the second container. Second container further filters out the ultraviolet components. Microwave radiation may be used instead of laser radiation to form the plasma."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Photon source, metrology apparatus, lithographic system and device manufacturing method","description":"A radiation driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a first container containing a gas (e.g. Xe). Collection ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9814126","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9814126","citation_suggestion":"Patentable. \"Photon source, metrology apparatus, lithographic system and device manufacturing method\" (US-9814126). https://patentable.app/patents/US-9814126","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9814126","json":"https://patentable.app/api/llm-context/US-9814126","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:41:18.941Z"}