{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9816176","patent":{"patent_number":"US-9816176","title":"Preparation method for multi-layer metal oxide porous film nano gas-sensitive material","assignee":null,"inventors":[],"filing_date":"2014-04-08T00:00:00.000Z","publication_date":"2017-11-14T00:00:00.000Z","cpc_codes":["G01N","B82Y"],"num_claims":4,"abstract":"The present invention discloses a method for preparing a multilayer metal oxide nano-porous thin film gas sensitive material, in which the microsphere aqueous solution is self-assembled on a substrate covered with an insulating layer, to form a compact single-layer array template; the surface of these microspheres are etched by using a plasma etching method to reduce the pitches between the microspheres; the metal oxide thin film is deposited by a physical deposition method; the template is removed by ultrasonic treatment with a solvent to prepare a porous array metal oxide thin film; and annealing is performed in air atmosphere to obtain the metal oxide porous thin film gas sensitive material. The present invention can be used for preparing a regular porous array thin film gas sensitive material; the pore size of the prepared porous thin film material is uniform and controllable; and the combination of these materials is controllable."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Preparation method for multi-layer metal oxide porous film nano gas-sensitive material","description":"The present invention discloses a method for preparing a multilayer metal oxide nano-porous thin film gas sensitive material, in which the microsphere aqueous solution is self-assembled on a substrate","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9816176","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9816176","citation_suggestion":"Patentable. \"Preparation method for multi-layer metal oxide porous film nano gas-sensitive material\" (US-9816176). https://patentable.app/patents/US-9816176","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9816176","json":"https://patentable.app/api/llm-context/US-9816176","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:37:16.109Z"}