{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9818629","patent":{"patent_number":"US-9818629","title":"Substrate processing apparatus and non-transitory computer-readable recording medium","assignee":null,"inventors":[],"filing_date":"2014-02-06T00:00:00.000Z","publication_date":"2017-11-14T00:00:00.000Z","cpc_codes":["H01L","G05B","G05B"],"num_claims":11,"abstract":"Provided is a substrate processing apparatus capable of efficiently resuming processing of unprocessed substrates after an error occurs during processing of substrates. In the substrate processing apparatus that executes a recipe defining an order of processing substrates and manages process status of the substrates, the process status are changed to a processing state so as to execute the recipe, are changed to a paused state when unprocessed substrates are present among the substrates to be processed according to the recipe, due to an error occurring during the execution of the recipe, and are changed from the paused state to the processing state to resume the execution of the recipe so as to process the unprocessed substrates when the error is canceled and a operation is performed to resume the execution of the recipe."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus and non-transitory computer-readable recording medium","description":"Provided is a substrate processing apparatus capable of efficiently resuming processing of unprocessed substrates after an error occurs during processing of substrates. In the substrate processing app","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9818629","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9818629","citation_suggestion":"Patentable. \"Substrate processing apparatus and non-transitory computer-readable recording medium\" (US-9818629). https://patentable.app/patents/US-9818629","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9818629","json":"https://patentable.app/api/llm-context/US-9818629","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:15:49.979Z"}