{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9818690","patent":{"patent_number":"US-9818690","title":"Self-aligned interconnection structure and method","assignee":null,"inventors":[],"filing_date":"2015-10-30T00:00:00.000Z","publication_date":"2017-11-14T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"The present disclosure provides a method that includes providing a substrate having a first dielectric material layer and first conductive features that are laterally separated from each other by segments of the first dielectric material layer; depositing a first etch stop layer on the first dielectric material layer and the first conductive features, thereby forming the first etch stop layer having oxygen-rich portions self-aligned with the segments of the first dielectric material layer and oxygen-poor portions self-aligned with the first conductive features; performing a selective removal process to selectively remove the oxygen-poor portions of the first etch stop layer; forming a second etch stop layer on the first conductive features and the oxygen-rich portions of the first etch stop layer; forming a second dielectric material layer on the second etch stop layer; and forming a conductive structure in the second dielectric material layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Self-aligned interconnection structure and method","description":"The present disclosure provides a method that includes providing a substrate having a first dielectric material layer and first conductive features that are laterally separated from each other by segm","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9818690","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9818690","citation_suggestion":"Patentable. \"Self-aligned interconnection structure and method\" (US-9818690). https://patentable.app/patents/US-9818690","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9818690","json":"https://patentable.app/api/llm-context/US-9818690","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:15:45.779Z"}