{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9820058","patent":{"patent_number":"US-9820058","title":"Capacitive MEMS microphone with insulating support between diaphragm and back plate","assignee":null,"inventors":[],"filing_date":"2014-12-29T00:00:00.000Z","publication_date":"2017-11-14T00:00:00.000Z","cpc_codes":["H04R","H04R"],"num_claims":12,"abstract":"Disclosed is MEMS microphone. The MEMS microphone includes a substrate and a capacitor system disposed on the substrate. The capacitor system has a back plate, a diaphragm, an insulating space formed by the back plate and the diaphragm and at least one insulating support disposed in the insulating space and connected with the back plate or the diaphragm. When the MEMS microphone is working, the insulating support engages with the diaphragm or the back plate thereby dividing the diaphragm into at least two vibrating units which improves the sensitivity and SNR of the MEMS microphone. Meanwhile, the MEMS microphone has the advantage of low cost and is easy to be fabricated."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Capacitive MEMS microphone with insulating support between diaphragm and back plate","description":"Disclosed is MEMS microphone. The MEMS microphone includes a substrate and a capacitor system disposed on the substrate. The capacitor system has a back plate, a diaphragm, an insulating space formed ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9820058","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9820058","citation_suggestion":"Patentable. \"Capacitive MEMS microphone with insulating support between diaphragm and back plate\" (US-9820058). https://patentable.app/patents/US-9820058","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9820058","json":"https://patentable.app/api/llm-context/US-9820058","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:19:19.488Z"}