{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9821469","patent":{"patent_number":"US-9821469","title":"Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device","assignee":null,"inventors":[],"filing_date":"2013-11-27T00:00:00.000Z","publication_date":"2017-11-21T00:00:00.000Z","cpc_codes":["B25J","B25J","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":46,"abstract":"A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device","description":"A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predete","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9821469","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9821469","citation_suggestion":"Patentable. \"Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device\" (US-9821469). https://patentable.app/patents/US-9821469","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9821469","json":"https://patentable.app/api/llm-context/US-9821469","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:17:43.356Z"}