{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9823181","patent":{"patent_number":"US-9823181","title":"Cp2Mg concentration measuring device","assignee":null,"inventors":[],"filing_date":"2016-08-18T00:00:00.000Z","publication_date":"2017-11-21T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":6,"abstract":"The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of Cp2Mg in a material gas."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Cp2Mg concentration measuring device","description":"The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9823181","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9823181","citation_suggestion":"Patentable. \"Cp2Mg concentration measuring device\" (US-9823181). https://patentable.app/patents/US-9823181","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9823181","json":"https://patentable.app/api/llm-context/US-9823181","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:53:12.614Z"}