{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9825051","patent":{"patent_number":"US-9825051","title":"Three dimensional NAND device containing fluorine doped layer and method of making thereof","assignee":null,"inventors":[],"filing_date":"2014-10-22T00:00:00.000Z","publication_date":"2017-11-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":12,"abstract":"A method of making a monolithic three dimensional NAND string comprising forming a stack of alternating layers of a first material and a second material different from the first material over a substrate, forming an at least one front side opening in the stack and forming at least a portion of a memory film in the at least one front side opening. The method also includes forming a semiconductor channel in the at least one front side opening and doping at least one of the memory film and the semiconductor channel with fluorine in-situ during deposition or by annealing in a fluorine containing atmosphere."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Three dimensional NAND device containing fluorine doped layer and method of making thereof","description":"A method of making a monolithic three dimensional NAND string comprising forming a stack of alternating layers of a first material and a second material different from the first material over a substr","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9825051","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9825051","citation_suggestion":"Patentable. \"Three dimensional NAND device containing fluorine doped layer and method of making thereof\" (US-9825051). https://patentable.app/patents/US-9825051","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9825051","json":"https://patentable.app/api/llm-context/US-9825051","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:43:38.499Z"}