{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9829415","patent":{"patent_number":"US-9829415","title":"Metrology sampling method and computer program product thereof","assignee":null,"inventors":[],"filing_date":"2015-03-24T00:00:00.000Z","publication_date":"2017-11-28T00:00:00.000Z","cpc_codes":["G01N","G05B","G06F","G05B"],"num_claims":16,"abstract":"In a metrology sampling method, various index values that can detect various status changes of a process tool (such as maintenance operation, parts changing, parameter adjustment, etc.), and/or information abnormalities of the process tool (such as abnormal process data, parameter drift/shift, abnormal metrology data, etc.) appear in a manufacturing process are applied to develop an intelligent sampling decision (ISD) scheme for reducing sampling rate while VM accuracy is still sustained. The indices includes a reliance Index (RI), a global similarity index (GSI), a process data quality index (DQIX) and a metrology data quality index (DQIy)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Metrology sampling method and computer program product thereof","description":"In a metrology sampling method, various index values that can detect various status changes of a process tool (such as maintenance operation, parts changing, parameter adjustment, etc.), and/or inform","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9829415","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9829415","citation_suggestion":"Patentable. \"Metrology sampling method and computer program product thereof\" (US-9829415). https://patentable.app/patents/US-9829415","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9829415","json":"https://patentable.app/api/llm-context/US-9829415","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:08:28.733Z"}