{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9830524","patent":{"patent_number":"US-9830524","title":"Method for estimating shape before shrink and CD-SEM apparatus","assignee":null,"inventors":[],"filing_date":"2012-05-24T00:00:00.000Z","publication_date":"2017-11-28T00:00:00.000Z","cpc_codes":["G01N","B82Y","B82Y","G06T","H01L","H01L"],"num_claims":13,"abstract":"In the present invention, at the time of measuring, using a CD-SEM, a length of a resist that shrinks when irradiated with an electron beam, in order to highly accurately estimate a shape and dimensions of the resist before shrink, a shrink database with respect to various patterns is previously prepared, said shrink database containing cross-sectional shape data obtained prior to electron beam irradiation, a cross-sectional shape data group and a CD-SEM image data group, which are obtained under various electron beam irradiation conditions, and models based on such data and data groups, and a CD-SEM image of a resist pattern to be measured is obtained (S102), then, the CD-SEM image and data in the shrink database are compared with each other (S103), and the shape and dimensions of the pattern before the shrink are estimated and outputted (S104)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for estimating shape before shrink and CD-SEM apparatus","description":"In the present invention, at the time of measuring, using a CD-SEM, a length of a resist that shrinks when irradiated with an electron beam, in order to highly accurately estimate a shape and dimensio","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9830524","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9830524","citation_suggestion":"Patentable. \"Method for estimating shape before shrink and CD-SEM apparatus\" (US-9830524). https://patentable.app/patents/US-9830524","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9830524","json":"https://patentable.app/api/llm-context/US-9830524","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:19:30.521Z"}