{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9830705","patent":{"patent_number":"US-9830705","title":"Image evaluation apparatus and pattern shape evaluation apparatus","assignee":null,"inventors":[],"filing_date":"2013-02-12T00:00:00.000Z","publication_date":"2017-11-28T00:00:00.000Z","cpc_codes":["G06T","G06T","H01L","G06T","G06T","G06T","H01L"],"num_claims":23,"abstract":"Provided are an image evaluation method and an image evaluation apparatus to evaluate a two-dimensional shape and a change in shape of a pattern side wall of a semiconductor pattern based on a SEM image, thus estimating an exposure condition. To this end, a method and a device include a storage unit that stores a model indicating a relationship between a feature amount that is obtained by creating a plurality of outlines from a SEM image and an exposure condition, and outline creation parameter information corresponding to the model; an outline creation unit that creates a plurality of outlines from a SEM image using the outline creation parameter information; and an estimation unit that uses a feature amount that is found based on the plurality of outlines created by the outline creation unit and the model to find an exposure condition."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Image evaluation apparatus and pattern shape evaluation apparatus","description":"Provided are an image evaluation method and an image evaluation apparatus to evaluate a two-dimensional shape and a change in shape of a pattern side wall of a semiconductor pattern based on a SEM ima","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9830705","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9830705","citation_suggestion":"Patentable. \"Image evaluation apparatus and pattern shape evaluation apparatus\" (US-9830705). https://patentable.app/patents/US-9830705","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9830705","json":"https://patentable.app/api/llm-context/US-9830705","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:59:44.292Z"}