{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9835444","patent":{"patent_number":"US-9835444","title":"Shape measuring device using frequency scanning interferometer","assignee":null,"inventors":[],"filing_date":"2014-05-20T00:00:00.000Z","publication_date":"2017-12-05T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":6,"abstract":"A shape measuring device includes a light source unit, a light splitting unit, a reference mirror, a light receiving unit and a processing unit. The light source unit generates light and can change the wavelength of the light. The light splitting unit splits the light generated from the light source unit into at least a reference light and a measurement light. The light receiving unit receives the reference light which is reflected by the reference mirror so as to form a reference light path, and the measurement light which is reflected by a light-transmitting target object formed on a substrate so as to form a measurement light path. The processing unit calculates the shape of the measurement argent object based on an interference change resulting from a wavelength change of the light between the reference light and the measurement light received by the light receiving unit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Shape measuring device using frequency scanning interferometer","description":"A shape measuring device includes a light source unit, a light splitting unit, a reference mirror, a light receiving unit and a processing unit. The light source unit generates light and can change th","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9835444","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9835444","citation_suggestion":"Patentable. \"Shape measuring device using frequency scanning interferometer\" (US-9835444). https://patentable.app/patents/US-9835444","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9835444","json":"https://patentable.app/api/llm-context/US-9835444","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:20:58.414Z"}