{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9836844","patent":{"patent_number":"US-9836844","title":"Coating apparatus and coating method","assignee":null,"inventors":[],"filing_date":"2015-03-20T00:00:00.000Z","publication_date":"2017-12-05T00:00:00.000Z","cpc_codes":["G06T","G05B","G05B","G05B","G06T"],"num_claims":11,"abstract":"Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a narrower viewing angle and higher resolution than the first imaging unit. The control unit performs a pre-alignment processing of capturing an image of a circular pre-alignment mark formed on the substrate using the first imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image and, after the pre-alignment processing, performs a fine-alignment processing of capturing an image of a circular fine-alignment mark formed on the substrate using the second imaging unit and performing positioning of the substrate by controlling the moving mechanism and the rotating mechanism based on the captured image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Coating apparatus and coating method","description":"Disclosed is a coating apparatus. A first imaging unit captures an image of the substrate disposed on the stage. A second imaging unit captures an image of the substrate disposed on the stage with a n","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9836844","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9836844","citation_suggestion":"Patentable. \"Coating apparatus and coating method\" (US-9836844). https://patentable.app/patents/US-9836844","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9836844","json":"https://patentable.app/api/llm-context/US-9836844","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:58:49.059Z"}