{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9842781","patent":{"patent_number":"US-9842781","title":"Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the same","assignee":null,"inventors":[],"filing_date":"2015-06-23T00:00:00.000Z","publication_date":"2017-12-12T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":5,"abstract":"An electrostatic chuck system includes an electrostatic chuck with a plurality of unit chucks supporting a display substrate, an optical photomask on the display substrate, the optical photomask having a material to be transferred onto the display substrate, a light source on the optical photomask, a gap measuring meter for measuring a gap between the display substrate and the optical photomask, a power source unit for applying power to each of the plurality of unit chucks through variable resistance units respectively connected to the plurality of unit chucks, and a control unit electrically connected to the gap measuring meter, the variable resistance units, and the power source unit, and transmits a signal for adjusting the gap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the same","description":"An electrostatic chuck system includes an electrostatic chuck with a plurality of unit chucks supporting a display substrate, an optical photomask on the display substrate, the optical photomask havin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9842781","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9842781","citation_suggestion":"Patentable. \"Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the same\" (US-9842781). https://patentable.app/patents/US-9842781","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9842781","json":"https://patentable.app/api/llm-context/US-9842781","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:04:45.756Z"}