{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9842870","patent":{"patent_number":"US-9842870","title":"Integrated bio-sensor with nanocavity and fabrication method thereof","assignee":null,"inventors":[],"filing_date":"2017-06-03T00:00:00.000Z","publication_date":"2017-12-12T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":24,"abstract":"A bio-sensor includes a substrate having a light-sensing region thereon. A first dielectric layer, a diffusion barrier layer, and a second dielectric layer are disposed on the substrate. A trenched recess structure is formed in the second dielectric layer, which is filled with a light filter layer that is capped with a cap layer. A first passivation layer and a nanocavity construction layer are disposed on the cap layer. A nanocavity is formed in the nanocavity construction layer. The sidewall and bottom surface of the nanocavity is lined with a second passivation layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Integrated bio-sensor with nanocavity and fabrication method thereof","description":"A bio-sensor includes a substrate having a light-sensing region thereon. A first dielectric layer, a diffusion barrier layer, and a second dielectric layer are disposed on the substrate. A trenched re","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9842870","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9842870","citation_suggestion":"Patentable. \"Integrated bio-sensor with nanocavity and fabrication method thereof\" (US-9842870). https://patentable.app/patents/US-9842870","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9842870","json":"https://patentable.app/api/llm-context/US-9842870","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:54:54.878Z"}