{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9846073","patent":{"patent_number":"US-9846073","title":"On-tool mass flow controller diagnostic systems and methods","assignee":null,"inventors":[],"filing_date":"2017-03-15T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["G05D"],"num_claims":18,"abstract":"Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed position and closing an upstream valve to produce a flow rate that decreases from a high flow rate, across a range of flow rates, to a low flow rate. A pressure signal is generated that is indicative of a pressure of the fluid within a volume between the upstream valve and a sensor tube, and a flow sensor signal is provided with the mass flow sensor that is indicative of a mass flow rate of the fluid through the main flow path. Ratio curves are produced that relate, across the range of flow rates, a rate of change of the pressure signal to the flow sensor signal and comparing a test ratio curve to a previously generated baseline ratio curve."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"On-tool mass flow controller diagnostic systems and methods","description":"Mass flow controllers with on-tool diagnostic capabilities and methods for on-tool diagnosis of mass flow controllers are disclosed herein. One method includes opening a control valve to a fixed posit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9846073","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9846073","citation_suggestion":"Patentable. \"On-tool mass flow controller diagnostic systems and methods\" (US-9846073). https://patentable.app/patents/US-9846073","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9846073","json":"https://patentable.app/api/llm-context/US-9846073","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:39:06.874Z"}