{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9846074","patent":{"patent_number":"US-9846074","title":"System for and method of monitoring flow through mass flow controllers in real time","assignee":null,"inventors":[],"filing_date":"2012-01-20T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["G05D"],"num_claims":15,"abstract":"A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System for and method of monitoring flow through mass flow controllers in real time","description":"A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure fl","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9846074","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9846074","citation_suggestion":"Patentable. \"System for and method of monitoring flow through mass flow controllers in real time\" (US-9846074). https://patentable.app/patents/US-9846074","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9846074","json":"https://patentable.app/api/llm-context/US-9846074","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:11:36.524Z"}