{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9846128","patent":{"patent_number":"US-9846128","title":"Inspection system and a method for evaluating an exit pupil of an inspection system","assignee":null,"inventors":[],"filing_date":"2016-01-19T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N"],"num_claims":15,"abstract":"An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection system and a method for evaluating an exit pupil of an inspection system","description":"An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be con","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9846128","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9846128","citation_suggestion":"Patentable. \"Inspection system and a method for evaluating an exit pupil of an inspection system\" (US-9846128). https://patentable.app/patents/US-9846128","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9846128","json":"https://patentable.app/api/llm-context/US-9846128","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:47:17.654Z"}