{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9846366","patent":{"patent_number":"US-9846366","title":"Projection optical system, exposure apparatus, and exposure method","assignee":null,"inventors":[],"filing_date":"2006-08-31T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":21,"abstract":"A catadioptric projection objective images a pattern provided in an object plane of the projection objective onto an image plane of the projection objective. The projection objective includes first, second and third objective parts. The first objective part images the pattern into a first intermediate image. The second objective part images the first intermediate image into a second intermediate image. The third objective part images the second intermediate image onto the image plane. A first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image. Pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate images and between the second intermediate image and the image plane. All concave mirrors are arranged optically remote from a pupil surface."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Projection optical system, exposure apparatus, and exposure method","description":"A catadioptric projection objective images a pattern provided in an object plane of the projection objective onto an image plane of the projection objective. The projection objective includes first, s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9846366","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9846366","citation_suggestion":"Patentable. \"Projection optical system, exposure apparatus, and exposure method\" (US-9846366). https://patentable.app/patents/US-9846366","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9846366","json":"https://patentable.app/api/llm-context/US-9846366","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:14:14.741Z"}