{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9846931","patent":{"patent_number":"US-9846931","title":"Pattern sensing device and semiconductor sensing system","assignee":null,"inventors":[],"filing_date":"2013-02-18T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["G06V","G06F","G06T","G06T","H01L","G06T","G06T"],"num_claims":15,"abstract":"An object of the invention is to provide a pattern measuring device for generating appropriate reference pattern data while suppressing an increase in the manufacturing cost that would occur when manufacturing conditions are finely changed. A pattern measuring device has an arithmetic processing unit for measuring a pattern formed on a sample. The arithmetic processing unit, on the basis of signals obtained with a charged particle beam device, acquires or generates image data or contour line data on a plurality of circuit patterns created under different manufacturing conditions of a manufacturing apparatus, and generates reference data to be used for measurement of a circuit pattern from the image data or contour line data."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Pattern sensing device and semiconductor sensing system","description":"An object of the invention is to provide a pattern measuring device for generating appropriate reference pattern data while suppressing an increase in the manufacturing cost that would occur when manu","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9846931","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9846931","citation_suggestion":"Patentable. \"Pattern sensing device and semiconductor sensing system\" (US-9846931). https://patentable.app/patents/US-9846931","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9846931","json":"https://patentable.app/api/llm-context/US-9846931","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:22:44.868Z"}