{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9847390","patent":{"patent_number":"US-9847390","title":"Self-aligned wrap-around contacts for nanosheet devices","assignee":null,"inventors":[],"filing_date":"2017-02-16T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["B82Y","H01L"],"num_claims":20,"abstract":"This disclosure relates to forming a wrap-around contact on a nanosheet transistor, the method including: forming an etch-stop layer over a continuous outer surface of a raised source/drain (S/D) region of the nanosheet transistor; forming a sacrificial layer over the etch-stop layer, the etch-stop layer including a different material than the sacrificial layer; depositing a dielectric layer over the sacrificial layer; removing an upper portion of the dielectric layer to expose a portion of the sacrificial layer; removing the sacrificial layer selective to the etch-stop layer; and depositing a conductor in the removed upper portion of the dielectric layer to form a wrap-around contact and a second contact."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Self-aligned wrap-around contacts for nanosheet devices","description":"This disclosure relates to forming a wrap-around contact on a nanosheet transistor, the method including: forming an etch-stop layer over a continuous outer surface of a raised source/drain (S/D) regi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9847390","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9847390","citation_suggestion":"Patentable. \"Self-aligned wrap-around contacts for nanosheet devices\" (US-9847390). https://patentable.app/patents/US-9847390","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9847390","json":"https://patentable.app/api/llm-context/US-9847390","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:35:47.760Z"}