{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9847402","patent":{"patent_number":"US-9847402","title":"Method of using polysilicon as stop layer in a replacement metal gate process","assignee":null,"inventors":[],"filing_date":"2017-08-02T00:00:00.000Z","publication_date":"2017-12-19T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":7,"abstract":"A method for fabricating semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a first region and a second region; forming a high-k dielectric layer on the first region and the second region; forming a first bottom barrier metal (BBM) layer on the high-k dielectric layer of the first region and the second region; forming a stop layer on the first region and the second region; removing the stop layer on the second region; and forming a second BBM layer on the first region and the second region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of using polysilicon as stop layer in a replacement metal gate process","description":"A method for fabricating semiconductor device includes the steps of: providing a substrate, wherein the substrate comprises a first region and a second region; forming a high-k dielectric layer on the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9847402","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9847402","citation_suggestion":"Patentable. \"Method of using polysilicon as stop layer in a replacement metal gate process\" (US-9847402). https://patentable.app/patents/US-9847402","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9847402","json":"https://patentable.app/api/llm-context/US-9847402","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:00:37.080Z"}